poly depletion metal gate
Thiseffectiscalledpolysilicondepletion.Itleadstoareducedelectronconcentrationattheinterfaceandcausesaneffectiveincreaseofthedielectric ...,1)Polysilicondepletionlowersthegatecapandincreasestheeffectiveelectricalthicknessofthegateinsulator.2)Quant...
栅极材料的革命(Gate Electrode) (转)
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2019年6月15日—(2um以前的时代都是MetalGate,1.5um以下的时代都是PolyGate了)。...再回来讨论Polygate吧,刚刚讲的如果直接在polygate...PolyDepletionEffect)。
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